ReticleSense® Wireless Measurement Devices
APSR / APSRQ
- Quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.15um within semiconductor process equipment and automated material handling systems.
- Easily identifies when and where the particles originate and measures the effectiveness of cleaning adjustments and repairs in real-time.
- Includes ParticleView™ and ParticleReview™ software.
- Speeds setting the right inclination by measuring pitch, roll, rise overrun and vertical inclinations.
- Quickly and accurately enables setting the same level across the tools for better process uniformity.
- Includes LevelView™ and LevelReview™ software.