ReticleSense® Wireless Measurement Devices


APSRQ

ReticleSense® Airborne Particle Sensor

APSR / APSRQ

  • Quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.15um within semiconductor process equipment and automated material handling systems.
  • Easily identifies when and where the particles originate and measures the effectiveness of cleaning adjustments and repairs in real-time.
  • Includes ParticleView™ and ParticleReview™ software.
ALSR

ReticleSense® Auto Leveling System

ALSR

  • Speeds setting the right inclination by measuring pitch, roll, rise, overrun and vertical inclinations.
  • Quickly and accurately enables setting the same level across the tools for better process uniformity.
  • Includes LevelView™ and LevelReview™ software.
ReticleSense Auto Multi Sensor

ReticleSense® Auto Multi Sensor™

AMSR

  • Speeds setting the right inclination by measuring pitch, roll, rise overrun and vertical inclinations.
  • Quickly and accurately enables setting the same level across the tools for better process uniformity.
  • Includes LevelView™ and LevelReview™ software.