Revolutionary Technology



One Button Automation for 3D Scanning
Highly precise full 360 scan in less than 3 minute cycle time.

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*Powered by MRS technology.

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Get accurate readings and improve your yield.

Introducing the thin and light
Auto Multi Sensor™ from CyberOptics.

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Only in full version!




WaferSense® Auto Multi Sensor™

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Award-winning intuitive touchscreen interface with extraordinary image quality.



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Improve equipment set-up and yields.

Ultra Accurate, Sensitive and Versatile.

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Only in full version!
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Save Time

Save Expense

Improve Yields

Next Generation Airborne Particle Sensors

* Powered by APS2 technology

Designed for use in ASML, Nikon and Canon scanners in the fab.

ReticleSense® APSRQ

Improve Yields and Tool Uptimes
Speed Qualification and Release to Production

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Ultimate Precision Accuracy with World Class Usability


True Volume Measurement with Dual Illumination Sensor
Best-in-Class Accuracy and Repeatability


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WaferSense® and ReticleSense™
Wireless Measurement Devices

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Only in full version!

88% Reduction
Half the Manpower

95% Reduction

20X Increase

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Fast, Intuitive & Scalable SPC Solution


Extremely simple set-up and fast charting in a few seconds.
Easy-to-use interface enabling minimal training.

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In High-Precision 3D Sensors that Significantly Improve Yields and Productivity in the 3D Scanning and Metrology, Surface Mount Technology (SMT) & Semiconductor Markets

Upcoming Tradeshows

Semicon West
July 12-14, 2016
Booth #2323

NEPCON South China
August 31- September 1, 2016
KAL Booth

Semicon Taiwan
September 7-9, 2016

CyberOptics Introduces Large Particle Sensing Functionality in Next-Generation WaferSense and ReticleSense Airborne Particle Sensors

06. 28. 16

CyberOptics announces it will showcase its next-generation Advanced Airborne Particle Sensors, that incorporate large particle sensing capability. Both the WaferSense® and ReticleSense® Airborne Particle Sensors (APS2, APSR and APSRQ) will be able to measure both small and large particles. Products will be on display at the upcoming SEMICON West 2016, the premier event for the global semiconductor industry, in San Francisco July 12-14, 2016, booth #2323.

SEMI and Solid State Technology Announce the 2016 “Bestof West” Award Finalists

06. 22. 16

Each year at SEMICON West, the “Best of West” awards are presented by Solid State Technology and SEMI. More than 700 companies exhibit at SEMICON West and 26,000+ professionals attend, from the electronics manufacturing supply chain. The “Best of West” award was established to recognize new products moving the industry forward with technological developments in the electronics supply chain.