Speed Your Semiconductor Processes

WaferSense® & ReticleSense® Wireless Measurement Devices


Dr. Subodh Kulkarni, President & CEO, CyberOptics

Whether it’s for leveling, vibration, relative humidity, airborne particle sensing, teaching, or gapping, CyberOptics WaferSense and ReticleSense sensors for Semiconductor fabs and equipment OEMs are the world’s most efficient and effective wireless measurement devices. CEO, Dr. Subodh Kulkarni provides a view into the use of CyberOptics’ Multiple Reflection Suppression (MRS) technology in back-end and front-end semiconductor.

Statements regarding the Company’s anticipated performance are forward-looking and therefore involve risks and uncertainties, including but not limited to: market conditions in the global SMT and semiconductor capital equipment industries; increasing price competition and price pressure on our product sales, particularly our SMT systems; the level of orders from our OEM customers; the availability of parts required for meeting customer orders; unanticipated product development challenges; the effect of world events on our sales, the majority of which are from foreign customers; product introductions and pricing by our competitors; the level of revenue and loss we record in 2014; the success of our 3D technology initiatives; expectations regarding LDI and its impact on our operations; integration risks associated with LDI and other factors set forth in the Company’s filings with the Securities and Exchange Commission

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Speed your semiconductor processes with WaferSense® and ReticleSense™ measurement devices.

When you need the most efficient and effective measurement devices for semiconductor tool set-up and maintenance processes, count on CyberOptics, the global market leader in wireless semiconductor measurement devices for chamber gapping, leveling, wafer handoff teaching, vibration and airborne particle measurement.

Semiconductor fabs and OEMs value the accuracy, precision and versatility of the WaferSense and ReticleSense measurement portfolio to enable improvements in fab yields and equipment uptime.

Save Time Expense

Save
Time &
Expense

  • Improve yields and increase tool uptime
  • Increase throughput
  • Reduce resource needs
  • Speed equipment set-up, maintenance cycles, trouble-shooting, qualification and release to production
  • Speed tool optimization, stabilization and standardization
  • Streamline fab processes
  • Establish repeatable and verifiable standards

Most Efficient & Effective

Most Efficient & Effective

  • Since the wireless, Bluetooth® enabled and battery powered devices are wafer or reticle shaped, they can generally travel anywhere a wafer or reticle travels, providing optimal ease-of-use and access to locations that otherwise may be difficult or impossible to reach.
  • Calibrations can be done under closed-chamber process conditions with the vacuum compatible Wafer Sense and Reticle Sense measurement devices.
  • Receive and record data in real-time on your laptop with CyberOptics’ easy-to-use software and count on accurate, precise, reliable and repeatable results that save time and expense compared to traditional or legacy methods.

ProvenAdopted_icon

Proven
&
Adopted

  • Major semiconductor fabs and equipment OEMs worldwide have adopted CyberOptics wireless measurement devices to improve yields, increase tool uptime and increase throughput.
  • Several OEM standards require the use of the WaferSense and ReticleSense devices which have been adopted as the BKM (best known method) due to the increased level of precision required with today’s ever smaller chip geometries.

WaferSense® Wireless Measurement Devices

ATS

WaferSense® Auto Teaching System

ATS

  • “Sees” inside equipment to capture three dimensional offset data (x, y, and z) to quickly teach wafer transfer positions with accuracy to 100um.
  • Improves yields and lowers particulate contamination with accurate wafer hand-off calibration, proper alignment and set ups.
  • Includes TeachView™, TeachReview™ and TeachTarget™ software.
auto gapping system

WaferSense® Auto Gapping System

AGS

  • Speeds non-contact gap measurements and parallelism adjustments under vacuum for semiconductor processes such as thin-film deposition, sputtering and etch.
  • Improves uniformity, tool availability and repeatability.
  • Includes GapView™ and GapReview™ software.
ALS2V

WaferSense® Auto Leveling System 2 Vertical

ALS2V

  • Speeds setting the right inclination by measuring pitch, roll, rise overrun and vertical inclinations.
  • Quickly and accurately enables setting the same level across the tools for better process uniformity.
  • Includes LevelView™ and LevelReview™ software.
AVS

WaferSense™ Auto Vibration System

AVS

  • Monitors 3-axis accelerations and vibration to enable yield improvements by maximizing acceleration and minimizing vibration.
  • Records vibration data for easy comparison between past and present, as well as one tool to another, to reduce particles, maintenance time and cycle time.
  • Includes VibeView™ and VibeReview™ software.
Auto Multi Sensor

WaferSense® Auto Multi Sensor™

AMS

  • Speed equipment qualification with wireless measurements.
  • Shorten equipment maintenance cycles with thin and lightweight wafer-like form factor.
  • Lower equipment maintenance expenses and enhance process uniformity with objectiveand reproducible data.
APS2

WaferSense® Airborne Particle Sensor™

APS2

  • Quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.14um within semiconductor process equipment and automated material handling systems.
  • Easily identifies when and where the particles originate and measures the effectiveness of cleaning adjustments and repairs in real-time.
  • Includes ParticleView™ and ParticleReview™ software.

ReticleSense® Wireless Measurement Devices

APSRQ

ReticleSense® Airborne Particle Sensor

APSR / APSRQ

  • Quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.15um within semiconductor process equipment and automated material handling systems.
  • Easily identifies when and where the particles originate and measures the effectiveness of cleaning adjustments and repairs in real-time.
  • Includes ParticleView™ and ParticleReview™ software.
ALSR

ReticleSense® Auto Leveling System

ALSR

  • Speeds setting the right inclination by measuring pitch, roll, rise, overrun and vertical inclinations.
  • Quickly and accurately enables setting the same level across the tools for better process uniformity.
  • Includes LevelView™ and LevelReview™ software.
ReticleSense Auto Multi Sensor

ReticleSense® Auto Multi Sensor™

AMSR

  • Speed equipment qualification with wireless measurements.
  • Shorten equipment maintenance cycles with reticle-like form factor.
  • Lower equipment maintenance expenses and enhance process uniformity with objective and reproducible data.

Wafer Mapping Sensors

exq

EX-Q Wafer Mapping Sensor

A Dramatic Step Forward in Wafer Detection

exqs

EX-QS Wafer Mapping Sensor

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