Precision Optical Sensor

3D Vision Solutions For Metrology, Assembly and Process Improvement


Measure. Analyze. Improve.

Precision Optical Sensor Case

CyberOptics Corporation has been an innovative supplier of precision optical sensor solutions to the manufacturers of automated assembly, inspection and metrology equipment for over 30 years. Our 2D and 3D vision solutions are used in manufacturing environments to increase operating efficiencies, production yields and quality. CyberOptics pioneering sensor technology provides our customers with a means to grow and strengthen their competitive positions as the demands for higher accuracy at faster production speeds increase.

High Precision Accuracy with Proprietary Multi-Reflection Suppression (MRS) Sensor Technology

Proprietary MRS sensor technology, deemed best-in-class, enables metrology-grade accuracy by inhibiting optical measurement distortions and reflections. At the heart of the world’s cell phone manufacturing inspection systems and used in various applications where highly accurate inspection is critical.


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Multi-Reflection Suppression (MRS) Sensor Technology integrated into Systems in Key Segments


Surface Mount Technology (SMT) Inspection

MRS Sensor for SQ3000 3D AOI System

CyberOptics’ breakthrough 3D sensing technology comprising four multi-view 3D sensors and a parallel projector delivering metrology grade accuracy at production speed. CyberOptics’ unique sensor architecture simultaneously captures and transmits multiple images in parallel while proprietary 3D fusing algorithms merge the images together. The result is ultra-high quality 3D images, accurate to sub 10 µm at production speed. Unmatched accuracy is achieved with the revolutionary MRS sensor technology by meticulously identifying and rejecting reflections caused by shiny components and reflective solder joints. Effective suppression of multiple reflections is critical for accurate measurement making MRS an ideal technology solution for a wide range of applications including those with very high quality requirements.

Ultra-High Resolution MRS Sensor for SQ3000 3D AOI

CyberOptics has advanced the proprietary Multi-Reflection Suppression (MRS) sensor to an even finer resolution with an accuracy of 7µm. The Ultra-High Resolution MRS sensor enhances the SQ3000 3D AOI platform, delivering superior inspection performance, ideally suited for the 0201 metric process and micro-electronic applications where an even greater degree of accuracy and inspection reliability is critical

MRS Sensor for SE3000 3D SPI

The new SE3000 3D SPI system is the world’s first SPI system to incorporate the industry-leading Multiple-Reflection Suppression (MRS) technology with a finer resolution for the best accuracy, repeatability and reproducibility – Even on the smallest paste deposits. Combined with the award-winning, easy-to-use SPI software, solder paste inspection has reached a new level of precision for the most stringent requirements.

3D Scanning Inspection and Metrology

MRS Sensor for CyberGage360

CyberGage360’s patented algorithms combine tremendous amounts of data into a single coordinate system using high-precision encoder position feedback for mechanical metrology-grade part measurement. No best fit piecing together of scan regions is used as is common in competitive projection scanning systems. The resulting part measurement provides NIST traceable system accuracy to 7 µm + L/10000, and repeatability to 5 µm. MRS suppresses the reflections caused by reflective surfaces better than any other projection scanning technology using the patented algorithms and optics born of MRS technology, resulting in a highly precise scan. The MRS sensor incorporated into the CyberGage360 system utilizes two dual camera optical blue light scanning sensors mounted above and below the subject part sitting on an optically flat, clear glass plate calibrated for scanning. The glass plate allows simultaneous data capture from both sensors and eliminates the need to flip-over the part necessary for all other scanning and other conventional measuring systems. CyberGage360 can be used on the factory floor, in the inspection lab, or for incoming parts inspection

MRS Sensor for Coordinate Measurement SQ3000 CMM

SQ3000 CMM utilizes CyberCMM™, a comprehensive software suite of coordinate measurement tools that provides highly accurate, 100% metrology-grade measurement on all critical points much faster than a traditional CMM, including coplanarity, distance, height and datum X, Y to name a few. A fast and easy set-up can be performed in less than an hour for programming complex applications as compared to slow, engineering resource-intensive set-up that typically requires multiple adjustments with traditional coordinate measurement machines (CMM) s.

SQ3000 3D CMM offers unmatched accuracy with the advanced MRS technology by meticulously identifying and rejecting reflections caused by shiny components making MRS an ideal technology solution for a wide range of applications including those with very high quality requirements.

The Ultra-High Resolution MRS sensor enhances the SQ3000 CMM platform, delivering superior performance ideally suited for Socket Metrology and micro-electronics applications where an even greater degree of accuracy and inspection reliability is critical.


Back-End Semi Packaging Inspection

MRS Sensor for Semiconductor

CyberOptics is an OEM supplier of proprietary MRS sensors to to KLA-Tencor (NASDAQ: KLAC) for KLATencor’s® BEOL package inspection systems.


High Speed 2D and 3D Sensor Solutions

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  • Metrology grade 3D accuracy at production speeds
  • Sensors that can acquire over 100 million 3D measurements per second
  • On-The-Fly measurement and inspection technology
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Manufacturing Process Improvement

Precision Optical Sensor Case
  • Inspection solutions that provide real-time feedback for product and process quality control
  • Increased equipment up-time and throughput
Precision Optical Sensor Case

Precision Optical Sensor Manufacturing Capability

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  • Complete turnkey sensing solutions for size, weight and cost critical applications
  • Advanced tooling and fixturing to ensure high quality and unsurpassed performance
Precision Optical Sensor Manufacture