CyberOptics Demonstrates How to Significantly Speed Semiconductor Processes for Measuring Relative Humidity

Semiconductor Fab

Join the team at the largest microelectronics event in Europe

Semicon Europa in Munich, Germany at B1-110 through November 17th

Semicon Europa

WaferSense® and ReticleSense® deliver 3 compelling bottom lines.

  • Save Time ~ 88% reduction, half the manpower
  • Save Expense ~95% reduction
  • Increase Throughput ~20X

Semiconductor Fab

What can the WaferSense and Reticle Sense Auto Multi Sensors  do for your fab?

Leveling Vibration Humidity

Speed equipment qualification with wireless measurements.

  • Collect and display acceleration, vibration, leveling and humidity data.
  • Monitor humidity in wafer environments.
  • Use the Auto Multi Sensor with MultiView™ and MultiReview™ software for real-time equipment diagnostics.
  • See the effects of adjustments in real-time, speeding equipment alignment and set-up.

Shorten equipment maintenance cycles with thin and lightweight wafer-like form factor.

  • Thinner 3.5mm form factor provides access to more chambers.
  • Operates at higher temperatures.
  • Keep the process areas unexposed to the fab environment with vacuum compatible AMS.

Lower equipment maintenance expenses and enhance process uniformity with objective and reproducible data.

  • Take the human element out of adjusting your equipment with objective measurements for multiple applications in one.
  • Make the right adjustments time after time.
  • Receive early warning for impending equipment failures and optimize your preventative maintenance plans.

Learn More About the WaferSense® Product Line »

Learn More About the ReticleSense® Product Line »

 CyberOptics Corporation
Technology Leadership. Global Solutions.
Semicon Europa Show Information »


Recent Posts

Upcoming Events

Press Releases

05. 28. 18

CyberOptics announces plans to exhibit at SEMICON West, scheduled to take place July 10-12, 2018 at the Moscone Center in San Francisco, CA. The company will demonstrate its next-generation Airborne Particle Sensor (APS3) 300mm with new ParticleSpectrum™ software in Booth #6163.

05. 09. 18

CyberOptics will lead a poster presentation during the Technical Exhibition at the European Mask and Lithography Conference (EMLC), June 19-20 in Grenoble, France.

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