Improve equipment set-up and long-term yields by wirelessly monitoring airborne particles in real-time.
Thinner. Lighter. Precision Accuracy.
Speed equipment qualification with wireless measurements.
Shorten equipment maintenance cycles with wafer-like form factor.
Lower equipment expenses with objective and reproducible data.
- Wafer-shaped Available in 150mm, 200mm, and 300mm wafer sizes.
- Measures particles greater than .14 microns Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.
- Wireless. Transmits particle data to your laptop or PC in real-time.
- Easy-to-use software. ParticleSpectrum™ application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.
Did You Know?Save Time. Save Expense. Speed up your semiconductor processes and increase throughput.
Time- 88% reduction,half the manpower
Expense- 95% reduction
Throughput- 20X increase