ReticleSense® Auto Leveling System
ALSR


ALSR

Speeds setting the right inclination and the same level across tools for better process uniformity.

Optimize equipment setup.

Measure the level conditions in real time in reticle handling equipment (i.e.: reticle stockers) and fully characterize your production equipment. Quickly verify alignment and inclination of the handling systems to prevent scratching and misalignment, so your equipment can be returned to productive use faster. Reticle-like and vacuum compatible, you don’t need to expose process areas to the fab environment.

Enhance process uniformity with objective and reproducible level adjustments.

Take the human element out of adjusting your equipment with objective numerical measurements. Easily and quickly review and store measurements with LevelView(TM) software graphical user interface. Make the right adjustments time after time. Attain better tool-to-tool process uniformity with leveling that is repeatable, technician-to-technician.

Reduce equipment maintenance time with wireless measurement.

Collect and display inclination data wirelessly with ALSR and LevelView™ software. See the effects of your adjustments in real time, speeding equipment alignment and returning it to productive use faster.

Features

  • Reticle-shaped. Available in reticle-shaped form factor.
  • Highly accurate. Measures horizontal and vertical leveling to 0.03 and 0.05 degrees respectively.
  • Wireless. Transmits data wirelessly to your laptop or PC in real-time.
  • Easy-to-use software. LevelView and LevelReview application software displays numerical and graphical inclination data letting you see the effects of your adjustments in real time, speeding equipment alignment and returning it to productive use faster.

See How Our Products Fit Into Your Process

ALSR

Data Sheets

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