ReticleSense® Airborne Particle Sensor


Improve equipment set-up and long term yields by wirelessly monitoring airborne particles in real-time.

Speed equipment qualification with wireless measurements.

Collect and display particle data wirelessly using the APSR and Particle Spectrum™ software for real-time equipment diagnostics. Compare past to present as well as one tool to another with recorded particle data. Save time by swiftly locating contamination sources with the APSR data and see the effect of cleanings, adjustments and repairs in real time.

Shorten equipment maintenance cycles with reticle-like form factor.

Detect particles in real-time without opening the tool so you don’t need to expose process areas to the environment. APSR goes where reticles go to find the place where particles contaminate reticles. Once the location of particles is identified, tools may be selectively cleaned. Open only the dirty portion, keep the clean areas clean.

Lower equipment expenses with objective and reproducible data.

Raise your first-pass monitor reticle success, reduce your qualification expense and increase availability with APSR. Receive early warning for impending equipment failures and optimize your preventative maintenance plans. Establish a baseline from known clean tool, then cycle APSR through a candidate tool before committing monitor reticles.


  • Reticle-shaped.  Also available in 150mm, 200mm and 300mm wafer sizes.
  • Measures particles greater than .14 microns Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.
  • Wireless. Transmits data to your laptop of PC in real-time.
  • Easy-to-use software. ParticleSpectrum application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.
APS Did You Know?

Did You Know?

Save Time. Save Expense. Speed up your semiconductor processes and increase throughput.
  • Time


    - 88% reduction,half the manpower
  • Expense


    - 95% reduction
  • Throughput


    - 20X increase

See How Our Products Fit Into Your Process

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