EX-QS Wafer Mapping Sensor
Good Things Do Come In Small Packages


The ultimate in wafer mapping accuracy is now available in a smaller package. EX-QS is an EX-Q repackaged in a smaller case to accommodate applications where space is limited. EX-QS wafer mapping sensors give you the same reliable wafer detection and easy integration as the EX-Q.


  • EX-QS is available in two standoff distances: 1.5″ and 2.2″. EX-Q is available in 1.5” and 2.2”
  • Detects bright, dark and coated wafers in various size and edge geometries at factory gain setting.
  • Insensitive to interference from the mapping environment including stray reflections.
  • Easy-to-use, “off-the-shelf” direct interface requires no amplification or signal conditioning and reduces tool total cost of ownership.
  • Non-intrusive wafer mapping solution protects valuable wafers from inadvertent crashes.
  • No moving parts that can result in particulate contamination.
  • Detects cross-slotted and ultra-thin wafers.
  • Note: Connector is an option and must be specified when ordered.

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