PanelSense™ Airborne Particle Sensor™

APS-FPD PanelSense

The new APS-FPD improves equipment set-up and yields by wirelessly monitoring airborne particles in real-time for Flat Panel Display manufacturing.

NEW ParticleSpectrum™ Software enables simultaneous measurement using multiple APS-FPD Devices.

Quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.14μm within flat panel display manufacturing equipment. Easily identifies when and where the particles originate.

Speed equipment qualification with wireless measurements.

Collect and display small and large particle data wirelessly using multiple APS-FPD devices and new ParticleSpectrum™ software for real-time equipment diagnostics.
Compare past and present data as well as one tool to another easier and faster without opening an additional application, now with Review functionality integrated with ParticleSpectrum™.

Shorten equipment maintenance cycles with flat panel device.

Locates and measures the place where particles contaminate flat panel displays. Once the location of particles is identified, tools may be selectively cleaned.
Save time by swiftly locating contamination sources and see the effect of cleanings, adjustments and repairs in real time.

Lower equipment expenses with objective and reproducible data.

Raise your first-pass monitor success, reduce your qualification expense and increase availability with APS-FPD.
Receive early warning for impending equipment failures and optimize your preventative maintenance plans.
Establish a baseline from known clean equipment, then use APS-FPD to qualify new or repaired equipment.


  • Designed for Flat Panel Display manufacturing. Available FPD form factor.
  • Measures particles greater than .14 microns Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.
  • Wireless. Transmits particle data to your laptop or PC in real-time. Enables simultaneous measurement using multiple APS-FPD devices.
  • Easy-to-use software. New ParticleSpectrum application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.

See How Our Products Fit Into Your Process

APS-FPD PanelSense

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