The new APS-FPD improves equipment set-up and yields by wirelessly monitoring airborne particles in real-time for Flat Panel Display manufacturing.
NEW ParticleSpectrum™ Software enables simultaneous measurement using multiple APS-FPD Devices.
Quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.14μm within flat panel display manufacturing equipment. Easily identifies when and where the particles originate.
Speed equipment qualification with wireless measurements.
Compare past and present data as well as one tool to another easier and faster without opening an additional application, now with Review functionality integrated with ParticleSpectrum™.
Shorten equipment maintenance cycles with flat panel device.
Save time by swiftly locating contamination sources and see the effect of cleanings, adjustments and repairs in real time.
Lower equipment expenses with objective and reproducible data.
Receive early warning for impending equipment failures and optimize your preventative maintenance plans.
Establish a baseline from known clean equipment, then use APS-FPD to qualify new or repaired equipment.
- Designed for Flat Panel Display manufacturing. Available FPD form factor.
- Measures particles greater than .14 microns Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.
- Wireless. Transmits particle data to your laptop or PC in real-time. Enables simultaneous measurement using multiple APS-FPD devices.
- Easy-to-use software. New ParticleSpectrum application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.