Product Downloads & Manuals

For all of your product information needs for WaferSense® and ReticleSense™ wireless measurement devices and wafer mapping sensors, including downloadable product instructions, technical notes and FAQs.

CyberOptics takes pride in providing responsive and expert technical support. Experienced and knowledgeable technical support/application engineers are just a click or phone call away at CSsupport@cyberoptics.com, 1 (800) 366-9131 or 1 (763) 542-5000.


WaferSense® & ReticleSense™ Wireless Measurement Devices

Auto Multi Sensors | AMS, AMSR

Manuals & Guides
Complete AMS Installation with Drivers

For additional dimensional drawing needs, please contact technical support/engineering at CSsupport@cyberoptics.com, 1-800-366-9131 or 1-763-542-5000.

Airborne Particle Sensors | APS2, APSR & APSRQ

Auto Teaching System | ATS

Manuals & Guides
Complete ATS Installation with Drivers
Dimensional Drawings

For additional dimensional drawing needs, please contact technical support/engineering at CSsupport@cyberoptics.com, 1-800-366-9131 or 1-763-542-5000.

Auto Vibration System | AVS

Manuals & Guides
Complete AVS Installation with Drivers
Data Sheets

For additional dimensional drawing needs, please contact technical support/engineering at CSsupport@cyberoptics.com, 1-800-366-9131 or 1-763-542-5000.


Wafer Mapping Sensors & Frame Grabbers

EX-43Q, EX-73Q, EX-83Q, EX-93Q, EX-43QS & EX-73QS

EXQ and EX-QS models are recommended for new designs and upgrades. They are backward compatible and deliver lower cost and higher performance than our legacy and discontinued models. Please contact technical support for the latest information.

Important Note

The EX-Q has the same mechanical footprint, electrical interface and digital output as EX and WX sensors. For specific questions regarding upgrading to EX-Q wafer mapping sensors, please contact technical support. The EX-QS is the performance equivalent of the EX-Q in a smaller package.

CyberOptics offers an Alignment Card that is designed to take the guesswork out of setup. It allows users to quickly and accurately verify working angles and standoff distance in order to ensure optimum wafer detection performance. Contact technical support to receive an Alignment Card.

Manuals & Guides
Tech Notes
Data Sheets

Legacy/Hama Mapping Sensors

Legacy Products

EX and WX mapping sensor models are available for copy exact replacements and Legacy applications. Please contact technical support to request a Return Material Authorization.

Discontinued Products

The following HAMA models have been discontinued: WX, ZX, DX, DT, DD, LR, WRM, DRM, ROX and RWX. These models can no longer be repaired. Please contact technical support for current replacement model selection and installation advice.

Laser Micrometers

These HAMA products have been discontinued. If you have a question or need a data sheet or user’s guide, please contact technical support. Discontinued micrometer products include PA and PAS Series micrometers, starter kit and DAC cable.

Upgrade Information

The EX-Q, EX-QS series of wafer mapping sensors can replace EX wafer mapping sensors as well as discontinued HAMA Laboratories and HAMA Sensors models: WX, ZX, DX, DT, DD, LR, WRM, DRM, ROX and RWX. Current models are backward compatibility and deliver lower cost and higher performance than legacy and discontinued models. Our applications engineers are ready to provide you model selection and installation advice. For more information about upgrading click here to contact technical support.