Speed your semiconductor processes with WaferSense® and ReticleSense® measurement devices


When you need the most efficient and effective measurement devices for semiconductor tool set-up and maintenance processes, count on CyberOptics, the global market leader in wireless semiconductor measurement devices for chamber gapping, leveling, wafer handoff teaching, vibration and airborne particle measurement.

introspect_2Semiconductor fabs and OEMs value the accuracy, precision and versatility of the WaferSense and ReticleSense measurement portfolio to enable improvements in fab yields and equipment uptime.

Mr. Yukinobu Hayashi—Field Application Engineer, CyberOptics— shared a poster presentation at the PhotoMask Japan Conference recently. He highlighted the 10X time savings using the ReticleSense APSR Quartz for identifying and resolving particle issues compared to alternate solutions.

At the recent CSManTech Conference, Mr. Allyn Jackson shared process improvement results in semiconductor manufacturing environments using WaferSense® and ReticleSense® Wireless Measurement Devices. Visit our site for more information about the entire semiconductor sensor portfolio that can significantly improve yields and tool uptime.

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Press Releases

12. 02. 15

CyberOptics will demonstrate the WaferSense® and ReticleSense® APS2 technology at Semicon Japan at Tokyo Big Sight, December 16th – 18th in booth #4804.

11. 17. 15

CyberOptics announced that it received a follow-on order valued at approximately $750,000 for SQ3000 automated optical inspection systems, based upon the company’s 3D Multi-Reflection Suppression (MRS) inspection technology platform. This 3D AOI order is scheduled to ship in this year’s fourth quarter.

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