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Allyn Jackson

Allyn Jackson, Field Application Engineer, CyberOptics will be presenting “Improving Efficiency and Effectiveness of Processes Related to Airborne Particles in Reticle Mask Environments” on a panel on September 16th.

Allyn Jackson

Photo of Allyn Jackson, Field Application Engineer, CyberOptics

Allyn will be presenting at Panel Session 5: Materials and Process at 4:35pm, September 16th

Stringent manufacturing requirements and the need to maximize both yields and tool uptimes in reticle mask environments, requires best-in-class practices for a contamination-free process environment. Quickly identifying when and where airborne particles originate and the source of the contamination is challenging with traditional surface scan wafer methods.

Whether for equipment diagnostics, particle qualification or preventative maintenance, equipment engineers need to identify and troubleshoot airborne particle issues efficiently and effectively. Legacy methods are not real time, may cause long delays for results and are costly in terms of downtime if required to tear down the fab tool or run a series of test wafers. Legacy methods can also lead to delays in equipment qualification, equipment release to production and maintenance cycles.

CyberOptics will review the advantages of using the wireless wafer-like real-time particle counter method to locate and troubleshoot airborne particles with the ReticleSense Airborne Particle Sensor (APSR) in reticle environments. This solution can quickly check the dozens of particle sensitive chambers that otherwise might take days to check with multiple surface scan wafers.

Along with the ParticleView software, particles are recorded to compare past to present as well as tool to tool. APSR follows the Reticle path and can travel to multiple areas to precisely and accurately detect where particles fall. APSR measurement devices are capable of detecting and counting particles as small 0.15 micron and transferring accurate real-time data wirelessly to a laptop or PC with graphical and numerical analysis. Tests or calibrations can be conducted under production conditions for seamless ease-of-use.

The APSR solution improves yields, optimizes maintenance and increases equipment uptime compared to legacy methods.

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