Leveling, Vibration and Humidity All-in-One?


The new WaferSense and ReticleSense Auto Multi Sensor (AMS/AMSR)  for leveling, vibration and humidity measurement garnered a lot of attention from various key semiconductor customers at Semicon West.


 What’s driving the need for humidity measurement?

“Humidity measurement has always been an important aspect of the semiconductor processing world ever since the first transistors were made. Humidity monitoring was always important because humidity leads to oxidization and silicon tends to oxidize fairly easily and even a thin oxide layer becomes a perfect insulator, whereas a silicon by definition is a semiconductor so measuring humidity to monitor how much oxidation is happening has always been important, but what makes it more critical now than before is the advent of new technology like FinFET technology that Intel pioneered a few years ago and now it’s beginning to get widespread adoption in the semiconductor world.

Even the small amount of oxidization that in the past was a nuisance, has become a killer now for productivity and yields, so humidity monitoring and measurement is of much more importance now than ever before and that’s why we are getting a lot of interest in this new Auto Multi Sensor (AMS/AMSR) that we are launching which combines humidity measurement with leveling and vibration at the same time.”

Dr. Subodh Kulkarni, President and CEO, CyberOptics.


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