Improving Yields with the Best Known Method (BKM) for Fast and Highly Accurate Airborne Particle Sensing

Airborne Particle Sensors

Join the team at Semicon Japan, Tokyo Big Sight, December 13-15th at Booth #5402.

Semicon Japan
WaferSense® and ReticleSense® measurement devices deliver 3 compelling bottom lines.

  • Save Time ~ 88% reduction, half the manpower
  • Save Expense ~95% reduction
  • Increase Throughput ~20X

Airborne Particle Sensors

What can the WaferSense and Reticle Sense Airborne Particle Sensors do for your fab?

Improve equipment set-up and long-term yields by wirelessly monitoring airborne particles in real-time.
Speed equipment qualification with wireless measurements.

  • Collect and display particle data wirelessly using the Airborne Particle Sensors and software for real-time equipment diagnostics.
  • Compare past and present as well as one tool to another.
  • Save time by swiftly locating contamination sources and see the effect of cleanings, adjustments and repairs in real-time.

Shorten equipment maintenance cycles.

  • Detect particles in real-time without opening the tool, so you don’t need to expose process areas to the environment.
  • Easily find the place where particles contaminate wafers with the thin and light Airborne Particle Sensors.
  • Selectively clean tools once the particle location is identified.

Lower equipment expenses with objective and reproducible data.

  • Raise your first-pass monitor wafer success, reduce your qualification expense and increase availability.
  • Receive early warnings for impending equipment failures and optimize your preventative maintenance plans.
  • Establish a baseline from a known clean tool, then cycle the Airborne Particle Sensor through a candidate tool before committing monitor wafers.

Meet with CyberOptics’ Mr. Yukinobu Hayashi at Semicon Japan to learn more.

CyberOptics Corporation
Technology Leadership. Global Solutions.
Semicon Japan Show Information »

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