CyberOptics Presents Solution for Monitoring Relative Humidity (RH) in RealTime to Improve Yield and Reduce Downtime

ReticleSense Auto Multi Sensor™

CyberOptics® Corporation will present and exhibit at The 23rd Symposium on Photomask and NGL Mask Technology in Yokohama, Japan, 6-8 April 2016.

A poster presentation on Tuesday, April 7, from 17:10-19:00 will feature Mr. Yukinobu Hayashi, Field Application Engineer for CyberOptics, discussing “Best practices for monitoring humidity in immersion scanner reticle environments to reduce reticle haze effects.”

“It is critical to effectively monitor RH in immersion scanners as adverse effects can result from haze when proper measures are not taken to measure and control it,” said Hayashi-san.

ReticleSense Auto Multi Sensor™CyberOptics’ ReticleSense® Auto Multi Sensor (AMSR) can measure humidity in all locations of the reticle environment and detect any place where H2O is exposed to the reticle. Monitoring humidity is critical in reducing reticle haze. Haze is an adverse effect on reticles caused by a combination of mask residue, 193nm light and H2O. In addition to RH measurement, the AMSR can also be used for vibration and leveling – all important factors for increasing yield and reducing downtime.

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