All New APS2 and AMS Sensors
CyberOptics Introduces Large Particle Sensing Functionality in Next-Generation WaferSense and ReticleSense Airborne Particle Sensors
CyberOptics has launched its next generation Advanced Airborne Particle Sensors, that incorporate large particle sensing capability. Both the WaferSense® and ReticleSense® Airborne Particle Sensors (APS2, APSR and APSRQ) can measure small and large particles.
CyberOptics’ APS2 portfolio improves equipment set-up and long-term yields in semiconductor fabs by wirelessly monitoring airborne particles in real-time.
The next-generation APS2 provides even greater versatility, with the industry-leading accuracy and sensitivity valued by semiconductor fabs and equipment OEMs worldwide. The new large particle detecting and measurement functionality covers a range of sizes with four bins for particles larger than 2, 5, 10 and 30 microns.
“We’ve evolved our widely adopted APS technology portfolio to include large particle measurement capability in the same devices our customers are routinely using to detect and measure small particles,” said Subodh Kulkarni, President and CEO of CyberOptics.
“Equipment and process engineers can speed equipment qualification, shorten maintenance cycles, and lower equipment expenses with objective and reproducible data – saving our customers time and money with a dual particle measurement capability.”