All New APS2 and AMS Sensors

APS2 and AMS Sensors Video

CyberOptics APS APSR Sensors

CyberOptics Introduces Large Particle Sensing Functionality in Next-Generation WaferSense and ReticleSense Airborne Particle Sensors

CyberOptics has launched its next generation Advanced Airborne Particle Sensors, that incorporate large particle sensing capability. Both the WaferSense® and ReticleSense® Airborne Particle Sensors (APS2, APSR and APSRQ) can measure small and large particles.

CyberOptics’ APS2 portfolio improves equipment set-up and long-term yields in semiconductor fabs by wirelessly monitoring airborne particles in real-time.

The next-generation APS2 provides even greater versatility, with the industry-leading accuracy and sensitivity valued by semiconductor fabs and equipment OEMs worldwide. The new large particle detecting and measurement functionality covers a range of sizes with four bins for particles larger than 2, 5, 10 and 30 microns.

“We’ve evolved our widely adopted APS technology portfolio to include large particle measurement capability in the same devices our customers are routinely using to detect and measure small particles,” said Subodh Kulkarni, President and CEO of CyberOptics.

“Equipment and process engineers can speed equipment qualification, shorten maintenance cycles, and lower equipment expenses with objective and reproducible data – saving our customers time and money with a dual particle measurement capability.”

Watch Allyn Jackson highlight the new APS2 and AMS Sensors.

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Upcoming Events

Press Releases

12. 02. 15

CyberOptics will demonstrate the WaferSense® and ReticleSense® APS2 technology at Semicon Japan at Tokyo Big Sight, December 16th – 18th in booth #4804.

11. 17. 15

CyberOptics announced that it received a follow-on order valued at approximately $750,000 for SQ3000 automated optical inspection systems, based upon the company’s 3D Multi-Reflection Suppression (MRS) inspection technology platform. This 3D AOI order is scheduled to ship in this year’s fourth quarter.

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